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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography PDF Author: Seongbo Shim
Publisher: Springer
ISBN: 331976294X
Category : Technology & Engineering
Languages : en
Pages : 138

Book Description
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

Directed Self-assembly of Block Co-polymers for Nano-manufacturing

Directed Self-assembly of Block Co-polymers for Nano-manufacturing PDF Author: Roel Gronheid
Publisher: Woodhead Publishing
ISBN: 0081002610
Category : Technology & Engineering
Languages : en
Pages : 328

Book Description
The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques. Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topic Discusses a broad range of practical applications for directed self-assembly in nano-manufacturing Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields

Updates in Advanced Lithography

Updates in Advanced Lithography PDF Author: Sumio Hosaka
Publisher: BoD – Books on Demand
ISBN: 9535111752
Category : Science
Languages : en
Pages : 264

Book Description
Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.

Advances in Nanostructured Materials and Nanopatterning Technologies

Advances in Nanostructured Materials and Nanopatterning Technologies PDF Author: Vincenzo Guarino
Publisher: Elsevier
ISBN: 0128173130
Category : Technology & Engineering
Languages : en
Pages : 474

Book Description
Advances in Nanostructured Materials and Nanopatterning Technologies: Applications for Healthcare, Environment and Energy demonstrates how to apply micro- and nanofabrication and bioextrusion based systems for cell printing, electrophoretic deposition, antimicrobial applications, and nanoparticles technologies for use in a range of green industry sectors, with an emphasis on emerging applications. Details strategies to design and realize smart nanostructured/patterned substrates for healthcare and energy and environmental applications Enables the preparation, characterization and fundamental understanding of nanostructured materials for promising applications in health, environmental and energy related sectors Provides a broader view of the context around existing projects and techniques, including discussions on potential new routes for fabrication

Bioinspired Materials Science and Engineering

Bioinspired Materials Science and Engineering PDF Author: Guang Yang
Publisher: John Wiley & Sons
ISBN: 1119390338
Category : Technology & Engineering
Languages : en
Pages : 400

Book Description
An authoritative introduction to the science and engineering of bioinspired materials Bioinspired Materials Science and Engineering offers a comprehensive view of the science and engineering of bioinspired materials and includes a discussion of biofabrication approaches and applications of bioinspired materials as they are fed back to nature in the guise of biomaterials. The authors also review some biological compounds and shows how they can be useful in the engineering of bioinspired materials. With contributions from noted experts in the field, this comprehensive resource considers biofabrication, biomacromolecules, and biomaterials. The authors illustrate the bioinspiration process from materials design and conception to application of bioinspired materials. In addition, the text presents the multidisciplinary aspect of the concept, and contains a typical example of how knowledge is acquired from nature, and how in turn this information contributes to biological sciences, with an accent on biomedical applications. This important resource: Offers an introduction to the science and engineering principles for the development of bioinspired materials Includes a summary of recent developments on biotemplated formation of inorganic materials using natural templates Illustrates the fabrication of 3D-tumor invasion models and their potential application in drug assessments Explores electroactive hydrogels based on natural polymers Contains information on turning mechanical properties of protein hydrogels for biomedical applications Written for chemists, biologists, physicists, and engineers, Bioinspired Materials Science and Engineering contains an indispensible resource for an understanding of bioinspired materials science and engineering.

Dissertation Abstracts International

Dissertation Abstracts International PDF Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 788

Book Description


Scientific and Technical Aerospace Reports

Scientific and Technical Aerospace Reports PDF Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 1572

Book Description


Directory of Graduate Research

Directory of Graduate Research PDF Author:
Publisher:
ISBN:
Category : Chemistry
Languages : en
Pages : 1850

Book Description
Faculties, publications and doctoral theses in departments or divisions of chemistry, chemical engineering, biochemistry and pharmaceutical and/or medicinal chemistry at universities in the United States and Canada.

Electrical & Electronics Abstracts

Electrical & Electronics Abstracts PDF Author:
Publisher:
ISBN:
Category : Electrical engineering
Languages : en
Pages : 1948

Book Description


Maskless lithography system and method with doubled throughput

Maskless lithography system and method with doubled throughput  PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description