Handbook of Optical Dimensional Metrology PDF Download

Author: Kevin Harding
Publisher: Taylor & Francis
ISBN: 1439854823
Category : Science
Languages : en
Pages : 497

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Book Description
Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods

Author: Toru Yoshizawa
Publisher: CRC Press
ISBN: 1351831844
Category : Technology & Engineering
Languages : en
Pages : 744

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Book Description
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

Author: Kevin G. Harding
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9781510622937
Category : Metrology
Languages : en
Pages : 0

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Book Description
Provides basic explanations of the operation and application of the most common methods in the field and in commercial use. The first half of the book presents a working knowledge of the mechanism and limitations of optical dimensional measurement methods. The book concludes with a series of manufacturing application examples.

Author: Rajpal S. Sirohi
Publisher: CRC Press
ISBN: 1482236117
Category : Technology & Engineering
Languages : en
Pages : 449

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Book Description
Introduction to Optical Metrology examines the theory and practice of various measurement methodologies utilizing the wave nature of light. The book begins by introducing the subject of optics, and then addresses the propagation of laser beams through free space and optical systems. After explaining how a Gaussian beam propagates, how to set up a collimator to get a collimated beam for experimentation, and how to detect and record optical signals, the text: Discusses interferometry, speckle metrology, moiré phenomenon, photoelasticity, and microscopy Describes the different principles used to measure the refractive indices of solids, liquids, and gases Presents methods for measuring curvature, focal length, angle, thickness, velocity, pressure, and length Details techniques for optical testing as well as for making fiber optic- and MEMS-based measurements Depicts a wave propagating in the positive z-direction by ei(ωt – kz), as opposed to ei(kz – ωt) Featuring exercise problems at the end of each chapter, Introduction to Optical Metrology provides an applied understanding of essential optical measurement concepts, techniques, and procedures.

Author: Alain C. Diebold
Publisher: CRC Press
ISBN: 0203904540
Category : Technology & Engineering
Languages : en
Pages : 703

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Book Description
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

Author: Toru Yoshizawa
Publisher: CRC Press
ISBN: 9781420019513
Category : Science
Languages : en
Pages : 744

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Book Description
The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals. Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications. With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.

Author: Song Zhang
Publisher: Taylor & Francis
ISBN: 1439872201
Category : Computers
Languages : en
Pages : 403

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Book Description
With the ongoing release of 3D movies and the emergence of 3D TVs, 3D imaging technologies have penetrated our daily lives. Yet choosing from the numerous 3D vision methods available can be frustrating for scientists and engineers, especially without a comprehensive resource to consult. Filling this gap, Handbook of 3D Machine Vision: Optical Metro

Author: Kevin G. Harding
Publisher:
ISBN: 9781510622944
Category : Electronic books
Languages : en
Pages : 228

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Book Description
Practical Optical Dimensional Metrology provides basic explanations of the operation and application of the most common methods in the field and in commercial use. The first half of the book presents a working knowledge of the mechanism and limitations of optical dimensional measurement methods that use: light level changes, two-dimensional imaging, triangulation, structured-light patterns, interference patterns, optical focus, light characteristics such as polarization, and hybrid methods with mechanical or other measurement tools. The book concludes with a series of manufacturing application examples that look at measurements from the centimeter range down to the nanometer range.

Author: Jay L. Bucher
Publisher:
ISBN: 9780873898386
Category : Calibration
Languages : en
Pages : 0

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Book Description
"The Measurement Quality Division, ASQ."

Author: Manuel Servin
Publisher: John Wiley & Sons
ISBN: 3527411526
Category : Technology & Engineering
Languages : en
Pages : 344

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Book Description
The main objective of this book is to present the basic theoretical principles and practical applications for the classical interferometric techniques and the most advanced methods in the field of modern fringe pattern analysis applied to optical metrology. A major novelty of this work is the presentation of a unified theoretical framework based on the Fourier description of phase shifting interferometry using the Frequency Transfer Function (FTF) along with the theory of Stochastic Process for the straightforward analysis and synthesis of phase shifting algorithms with desired properties such as spectral response, detuning and signal-to-noise robustness, harmonic rejection, etc.