Author: M. Edward MotamediPublisher: SPIE-International Society for Optical Engineering
ISBN: 9780819422798
Category : Electromechanical devices
Languages : en
Pages : 220
Book Description
Microelectronic Structures and MEMS for Optical Processing II
Author: M. Edward MotamediPublisher: SPIE-International Society for Optical Engineering
ISBN: 9780819422798
Category : Electromechanical devices
Languages : en
Pages : 220
Book Description
Microelectronic Structures and MEMS for Optical Processing III
Author: M. Edward MotamediPublisher: Society of Photo Optical
ISBN: 9780819426581
Category : Technology & Engineering
Languages : en
Pages : 214
Book Description
Microelectronic Structures and MEMS for Optical Processing
Author: Microelectronic Structures and MEMS for Optical Processing IV
Author: M. Edward MotamediPublisher: SPIE-International Society for Optical Engineering
ISBN: 9780819429728
Category : Science
Languages : en
Pages : 0
Book Description
A volume of papers on microelectronic structures and MEMS for optical processing. It explores: micromirrors; micro-optical components and microsensors; optomechanical switches; and modulators and microactuators.
Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Author: Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Author: Wayne E. BaileyPublisher: Society of Photo Optical
ISBN: 9780819420077
Category : Technology & Engineering
Languages : en
Pages : 154
Book Description
Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Author: Wayne E. BaileyPublisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 154
Book Description
Passive Micro-Optical Alignment Methods
Author: Robert A. BoudreauPublisher: CRC Press
ISBN: 1420027727
Category : Science
Languages : en
Pages : 416
Book Description
The most expensive phase in the manufacture of micro-optical components and fiber optics is also one of the most performance-critical: optical alignment of the components. The increasing degree of miniaturization makes this an especially challenging task. Active alignment methods result in higher costs and awkward processes, and for some applications, they simply are not possible. Passive Micro-Optical Alignment Methods introduces the passive alignment methods that are currently available and illustrates them with many examples, references, and critiques. The first book dedicated to passive alignment, it begins with an overview of the current activities, requirements, and general results of passive optical alignments, followed by three sections of in-depth analysis. The first of these discusses mechanical passive alignment, highlighting silicon waferboard, solder, and "Jitney" technologies as well as application of mechanical alignment to 3D free-space interconnects. The next section describes the various visual alignment techniques applied to Planar Lightwave Circuits (PLCs) and low-cost plastic and surface mount packaging. The final section details various utilities that aid passive alignment and their resulting tradeoffs and demonstrates Monte Carlo analysis to evaluate the potential of a given method. Passive Micro-Optical Alignment Methods provides the tools necessary to meet the challenge of precision and low-cost alignment for applications that require micron or sub-micron tolerance.
Process Variations in Microsystems Manufacturing
Author: Michael HuffPublisher: Springer Nature
ISBN: 3030405605
Category : Technology & Engineering
Languages : en
Pages : 521
Book Description
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
Optical Nano- and Microsystems for Bioanalytics
Author: Wolfgang FritzschePublisher: Springer Science & Business Media
ISBN: 3642254977
Category : Science
Languages : en
Pages : 332
Book Description
This book describes the state of the art in the field of bioanalytical nano- and microsystems with optical functionality. In 12 chapters distinguished scientists and leaders in their respective fields show how various optical technologies have been miniaturized and integrated over the last few decades in order to be combined with nano- and microsystems for applications in the life sciences. The main detection and characterization technologies are introduced, and examples of the superiority of these integrated approaches compared to traditional ones are provided. Examples from e.g. the fields of optical waveguides, integrated interferometers, surface plasmon resonance or Raman spectroscopy are introduced and discussed, and it is shown how these approaches have led to novel functionalities and thereby novel applications.