Microsensors, MEMS, and Smart Devices PDF Download

Author: Julian W. Gardner
Publisher: John Wiley & Sons
ISBN:
Category : Science
Languages : en
Pages : 536

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Book Description
Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Author: S Nihtianov
Publisher: Woodhead Publishing
ISBN: 0081020562
Category : Technology & Engineering
Languages : en
Pages : 604

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Book Description
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

Author: K. J. Vinoy
Publisher: Springer
ISBN: 8132219139
Category : Technology & Engineering
Languages : en
Pages : 508

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Book Description
The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

Author: Vijay K. Varadan
Publisher: John Wiley & Sons
ISBN: 0470093625
Category : Technology & Engineering
Languages : en
Pages : 418

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Book Description
Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

Author: Julian W. Gardner
Publisher: Wiley
ISBN: 9780471941354
Category : Technology & Engineering
Languages : en
Pages : 344

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Book Description
The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.

Author: Stephen Beeby
Publisher: Artech House
ISBN: 9781580538732
Category : Technology & Engineering
Languages : en
Pages : 282

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Book Description
Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Author: Julian W. Gardner
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 346

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Book Description
Devoted primarily to the many applications of microsensors, this text covers thermal, radiation, mechanical, magnetic, chemical and biological microsensors. Information is also provided on basic processing, interfacing and bus systems, microsensor array and intelligent sensors.

Author: Julian W. Gardner
Publisher: Wiley
ISBN: 9780470850435
Category : Technology & Engineering
Languages : en
Pages : 0

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Book Description
Essential update on the development of new processing, packaging and assembly methodologies for microsensor devices, with new coverage on ‘system on a chip’ and ‘laboratory on a chip’ The miniaturisation of sensors has been made possible by advances in the technologies originating in the semiconductor industry, and the emergent field of microsensors has grown rapidly over the past ten years. This book updates the successful first edition (published in 1994) to cover the fundamental principles, developments and applications of microsensors. Two new chapters will be included and will provide coverage of both CMOS device processing technologies and smart sensors, in particular BioMEMS and the system-on-chip, lab-on-a-chip, and noise-on-a-chip. Other new sections will update the treatment of optical and magnetic sensors, MOEMS and smart sensor interfacing. Worked examples will be included to illustrate key processes and applications. The end-of-chapter problems will be revised and updated. This is an increasingly important area of research and development. Microsensors are a growing aspect of Microelectronics courses at final year undergraduate and postgraduate level. A thorough update of the well-received first edition is timely. Provides a timely update of a classic reference on this increasingly important field Presents an introduction to sensors and measurement systems and the processing of materials for microsensor fabrication Comprehensive coverage of thermal, magnetic, optical, mechanical, chemical and biological microsensors Updated sections highlighting the development of new processing, packaging and assembly methodologies for microsensor devices New chapter charting the evolution of the smart sensor and microsystem, with coverage of ‘system on a chip’ and ‘laboratory on a chip’

Author: Stephen Beeby
Publisher: Artech House
ISBN: 1580535364
Category : Technology & Engineering
Languages : en
Pages : 269

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Book Description
Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Author: Jiyan Dai
Publisher: John Wiley & Sons
ISBN: 3527344764
Category : Technology & Engineering
Languages : en
Pages : 262

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Book Description
Presents state-of-the-art knowledge?from basic insights to applications?on ferroic materials-based devices This book covers the fundamental physics, fabrication methods, and applications of ferroic materials and covers bulk, thin films, and nanomaterials. It provides a thorough overview of smart materials and systems involving the interplays among the mechanical strain, electrical polarization, magnetization, as well as heat and light. Materials presented include ferroelectric, multiferroic, piezoelectric, electrostrictive, magnetostrictive, and shape memory materials as well as their composites. The book also introduces various sensor and transducer applications, such as ultrasonic transducers, surface acoustic wave devices, microwave devices, magneto-electric devices, infrared detectors and memories. Ferroic Materials for Smart Systems: Fabrication, Devices and Applications introduces advanced measurement and testing techniques in ferroelectrics, including FeRAM and ferroelectric tunnelling based resistive switching. It also looks at ferroelectricity in emerging materials, such as 2D materials and high-k gate dielectric material HfO2. Engineering considerations for device design and fabrication are examined, as well as applications for magnetostrictive devices. Multiferroics of materials possessing both ferromagnetic and ferroelectric orders is covered, along with ferroelastic materials represented by shape memory alloy and magnetic shape memory alloys. -Brings together physics, fabrication, and applications of ferroic materials in a coherent manner -Discusses recent advances in ferroic materials technology and applications -Covers dielectric, ferroelectric, pyroelectric and piezoelectric materials -Introduces electrostrictive materials and magnetostrictive materials -Examines shape memory alloys and magneto-shape-memory alloys -Introduces devices based on the integration of ferroelectric and ferromagnetic materials such as multiferroic memory device and ME coupling device for sensor applications Ferroic Materials for Smart Systems: Fabrication, Devices and Applications will appeal to a wide variety of researchers and developers in physics, materials science and engineering.