Author: Peter J. HeskethPublisher: The Electrochemical Society
ISBN: 9781566773720
Category : Microelectromechanical systems
Languages : en
Pages : 268
Book Description
Microfabricated Systems and MEMS VI
Author: Peter J. HeskethPublisher: The Electrochemical Society
ISBN: 9781566773720
Category : Microelectromechanical systems
Languages : en
Pages : 268
Book Description
Microfabricated Systems and MEMS VI
Author: Peter J. HeskethPublisher: The Electrochemical Society
ISBN: 9781566773720
Category : Microelectromechanical systems
Languages : en
Pages : 268
Book Description
Microfabricated Systems and MEMS VII
Author: Publisher: The Electrochemical Society
ISBN: 9781566774222
Category : Microelectromechanical systems
Languages : en
Pages : 352
Book Description
Microfabricated Systems and MEMS ...
Author: Microfabricated Systems and MEMS V
Author: Publisher: The Electrochemical Society
ISBN: 9781566772860
Category : Technology & Engineering
Languages : en
Pages : 278
Book Description
MEMS
Author: Mohamed Gad-el-HakPublisher: CRC Press
ISBN: 1420036564
Category : Technology & Engineering
Languages : en
Pages : 664
Book Description
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication. MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
Microstereolithography and Other Fabrication Techniques for 3D MEMS
Author: Vijay K. VaradanPublisher: John Wiley & Sons
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 290
Book Description
This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.
Manufacturing Techniques for Microfabrication and Nanotechnology
Author: Marc J. MadouPublisher: CRC Press
ISBN: 1420055194
Category : Technology & Engineering
Languages : en
Pages : 672
Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Mems/Nems
Author: Cornelius T. LeondesPublisher: Springer Science & Business Media
ISBN: 0387257861
Category : Technology & Engineering
Languages : en
Pages : 2094
Book Description
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Fundamentals of Microfabrication
Author: Marc J. MadouPublisher: CRC Press
ISBN: 9780849308260
Category : Technology & Engineering
Languages : en
Pages : 826
Book Description
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter