Author: Cor L. ClaeysPublisher: The Electrochemical Society
ISBN: 9781566773089
Category : Technology & Engineering
Languages : en
Pages : 636
Book Description
ULSI Process Integration II
Author: Cor L. ClaeysPublisher: The Electrochemical Society
ISBN: 9781566773089
Category : Technology & Engineering
Languages : en
Pages : 636
Book Description
ULSI Process Integration 7
Author: C. ClaeysPublisher: The Electrochemical Society
ISBN: 1607682613
Category :
Languages : en
Pages : 429
Book Description
ULSI Process Integration 6
Author: C. ClaeysPublisher: The Electrochemical Society
ISBN: 1566777445
Category : Integrated circuits
Languages : en
Pages : 547
Book Description
ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
ULSI Process Integration 5
Author: Cor L. ClaeysPublisher: The Electrochemical Society
ISBN: 1566775728
Category : Integrated circuits
Languages : en
Pages : 509
Book Description
The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.
ULSI Process Integration III
Author: Electrochemical Society. MeetingPublisher: The Electrochemical Society
ISBN: 9781566773768
Category : Technology & Engineering
Languages : en
Pages : 620
Book Description
Microelectronics, Microsystems and Nanotechnology
Author: Androula G. NassiopoulouPublisher: World Scientific
ISBN: 9810247699
Category : Technology & Engineering
Languages : en
Pages : 409
Book Description
This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.
Microelectronics, Microsystems And Nanotechnology: Papers Presented Of At Mmn 2000
Author: Androula G NassiopoulouPublisher: World Scientific
ISBN: 9814489999
Category : Technology & Engineering
Languages : en
Pages : 409
Book Description
This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.
Microelectronics Technology and Devices, SBMICRO 2002
Author: Electrochemical Society. Electronics DivisionPublisher: The Electrochemical Society
ISBN: 9781566773287
Category : Technology & Engineering
Languages : en
Pages : 506
Book Description
ULSI Process Integration
Author: Cor L. ClaeysPublisher: The Electrochemical Society
ISBN: 9781566772419
Category : Computers
Languages : en
Pages : 408
Book Description
ULSI Process Integration 9
Author: C. ClaeysPublisher: The Electrochemical Society
ISBN: 1607686759
Category :
Languages : en
Pages : 335
Book Description